Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Optimal design of depth-scaling error for multilayer diffractive optical elements with oblique incidence

Not Accessible

Your library or personal account may give you access

Abstract

The mathematical analytic models of the relationship between depth-scaling error and diffraction efficiency/polychromatic integral diffraction efficiency (PIDE) for multilayer diffractive optical elements (MLDOEs) with oblique incidence are presented. A method for optimal design of the depth-scaling error for MLDOEs with consideration of comprehensive PIDE working within a range of incident angle is established. The effect of depth-scaling error on diffraction efficiency and PIDE of MLDOEs working in the visible wavelength with oblique incidence is analyzed. For the MLDOEs working within the range of incident angle 0–20°, the maximum comprehensive PIDE is 98.24%, and the optimal relative depth-scaling error is 6.55%. The analytic method and conclusion provide a theoretical basis for the determination of manufacturing tolerance of depth-scaling error for MLDOEs with oblique incidence.

© 2017 Optical Society of America

Full Article  |  PDF Article
More Like This
Optimization and analysis of infrared multilayer diffractive optical elements with finite feature sizes

Chao Yang, Hongfang Yang, Chuang Li, and Changxi Xue
Appl. Opt. 58(10) 2589-2595 (2019)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (7)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved