Abstract

In this paper, we propose a simple method to reduce the grating modulation depth of guided-mode resonance (GMR) filter devices by using a multiple-mold replica method in the nanoimprinting process in order to achieve narrowband optical filters. This method is based on the shrinking effect of the polydimethylsiloxane (PDMS) mold during solidification. The shrinking effect in the groove depth (vertical) direction can be modulated by selecting different UV curing glues. On the other hand, the shrinking effect in the pitch (lateral) direction is prevented by the groove shape and not related to the UV glues. Therefore, the groove pitch can be kept constant during harness shrinkage. We show that different UV curing glues used in the nanoimprinting process have different effects on the replica PDMS mold. In our experiments, two kinds of UV glues were used and PDMS molds with five different grating depths were obtained. Finally, five transmitted GMR band-reject filters with different full width at half-maximum values were fabricated. These five GMR filters made by the nanoimprinting solgel SiO2 process have five different grating depths: 75, 56, 36, 27, and 18 nm.

© 2016 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Multiple-channel guided mode resonance Brewster filter with controllable spectral separation

Jianyong Ma, Hongchao Cao, and Changhe Zhou
Appl. Opt. 53(13) 2787-2792 (2014)

High-efficiency guided-mode resonance filter

Z. S. Liu, S. Tibuleac, D. Shin, P. P. Young, and R. Magnusson
Opt. Lett. 23(19) 1556-1558 (1998)

Tunable sensitivity phase detection of transmitted-type dual-channel guided-mode resonance sensor based on phase-shift interferometry

Wen-Kai Kuo, Siang-He Syu, Peng-Zhi Lin, and Hsin Her Yu
Appl. Opt. 55(4) 903-907 (2016)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (14)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription