Abstract
Three-dimensional (3D) inspection in the factory requires precision and speed. While customers can select from a wide spectrum of high-precision sensors, the real challenge today is “speed.” We discuss the speed of 3D sensors in a general context to provide an understanding of why high-resolution 3D sensors deliver significantly fewer 3D points per second than the available camera pixel rates suggest. The major cause of low speed is the large number of required exposures due to the unavoidable depth scanning. Through the example of structured-illumination microscopy (SIM), we demonstrate how can be minimized without reducing precision. We further demonstrate a lateral scanning strategy that operates at a significantly higher speed for macroscopic measurements by avoiding explicit depth scanning. This paper is a follow up on an earlier paper about the precision limits of SIM and exploits the earlier results.
© 2016 Optical Society of America
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