J. J. Toriz-Garcia, J. J. Cowling, G. L. Williams, Q. Bai, N. L. Seed, A. Tennant, R. McWilliam, A. Purvis, F. B. Soulard, and P. A. Ivey, “Fabrication of a 3D electrically small antenna using holographic photolithography,” J. Micromech. Microeng. 23, 055010 (2013).

[Crossref]

E. Buckley, “Holographic laser projection,” J. Disp. Technol. 7, 135–140 (2011).

[Crossref]

F. Wyrowski, E.-B. Kley, S. Buehling, T. J. Nellissen, L. Wang, and M. Dirkzwager, “Proximity printing by wave-optically designed masks,” Proc. SPIE 4436, 130–139 (2001).

[Crossref]

J. J. Toriz-Garcia, J. J. Cowling, G. L. Williams, Q. Bai, N. L. Seed, A. Tennant, R. McWilliam, A. Purvis, F. B. Soulard, and P. A. Ivey, “Fabrication of a 3D electrically small antenna using holographic photolithography,” J. Micromech. Microeng. 23, 055010 (2013).

[Crossref]

J. J. Cowling, G. L. Williams, A. Purvis, R. McWilliam, J. J. Toriz-Garcia, N. L. Seed, F. B. Soulard, and P. A. Ivey, “Three-dimensional holographic lithography by an iterative algorithm,” Opt. Lett. 36, 2495–2497 (2011).

[Crossref]

J. J. Cowling, “An iterative algorithm for lithography on three-dimensional surfaces,” Ph.D. thesis (Durham University, 2015).

F. Wyrowski, E.-B. Kley, S. Buehling, T. J. Nellissen, L. Wang, and M. Dirkzwager, “Proximity printing by wave-optically designed masks,” Proc. SPIE 4436, 130–139 (2001).

[Crossref]

R. W. Gerchberg and W. O. Saxton, “Phase determination for image and diffraction plane pictures in the electron microscope,” Optik 34, 275–284 (1971).

J. J. Toriz-Garcia, J. J. Cowling, G. L. Williams, Q. Bai, N. L. Seed, A. Tennant, R. McWilliam, A. Purvis, F. B. Soulard, and P. A. Ivey, “Fabrication of a 3D electrically small antenna using holographic photolithography,” J. Micromech. Microeng. 23, 055010 (2013).

[Crossref]

J. J. Cowling, G. L. Williams, A. Purvis, R. McWilliam, J. J. Toriz-Garcia, N. L. Seed, F. B. Soulard, and P. A. Ivey, “Three-dimensional holographic lithography by an iterative algorithm,” Opt. Lett. 36, 2495–2497 (2011).

[Crossref]

A. Maiden, R. McWilliam, A. Purvis, S. Johnson, G. L. Williams, N. L. Seed, and P. A. Ivey, “Nonplanar photolithography with computer-generated holograms,” Opt. Lett. 30, 1300–1302 (2005).

[Crossref]

G. L. Williams, R. McWilliam, A. Maiden, A. Purvis, P. A. Ivey, and N. L. Seed, “Photolithography on grossly non-planar substrates,” in Conference on High Density Microsystem Design and Packaging and Component Failure Analysis (IEEE, 2005), pp. 442–446.

F. Wyrowski, E.-B. Kley, S. Buehling, T. J. Nellissen, L. Wang, and M. Dirkzwager, “Proximity printing by wave-optically designed masks,” Proc. SPIE 4436, 130–139 (2001).

[Crossref]

A. Maiden, R. McWilliam, A. Purvis, S. Johnson, G. L. Williams, N. L. Seed, and P. A. Ivey, “Nonplanar photolithography with computer-generated holograms,” Opt. Lett. 30, 1300–1302 (2005).

[Crossref]

G. L. Williams, R. McWilliam, A. Maiden, A. Purvis, P. A. Ivey, and N. L. Seed, “Photolithography on grossly non-planar substrates,” in Conference on High Density Microsystem Design and Packaging and Component Failure Analysis (IEEE, 2005), pp. 442–446.

J. J. Toriz-Garcia, J. J. Cowling, G. L. Williams, Q. Bai, N. L. Seed, A. Tennant, R. McWilliam, A. Purvis, F. B. Soulard, and P. A. Ivey, “Fabrication of a 3D electrically small antenna using holographic photolithography,” J. Micromech. Microeng. 23, 055010 (2013).

[Crossref]

J. J. Cowling, G. L. Williams, A. Purvis, R. McWilliam, J. J. Toriz-Garcia, N. L. Seed, F. B. Soulard, and P. A. Ivey, “Three-dimensional holographic lithography by an iterative algorithm,” Opt. Lett. 36, 2495–2497 (2011).

[Crossref]

A. Maiden, R. McWilliam, A. Purvis, S. Johnson, G. L. Williams, N. L. Seed, and P. A. Ivey, “Nonplanar photolithography with computer-generated holograms,” Opt. Lett. 30, 1300–1302 (2005).

[Crossref]

R. McWilliam, A. Purvis, G. Williams, F. Soulard, and N. L. Seed, “High contrast patterns generated by phase-seeded CGH extensible to 3-D patterns and binary modulation,” in Digital Holography & 3-D Imaging Meeting, OSA Technical Digest (Optical Society of America, 2015), paper DTh4A.4.

G. L. Williams, R. McWilliam, A. Maiden, A. Purvis, P. A. Ivey, and N. L. Seed, “Photolithography on grossly non-planar substrates,” in Conference on High Density Microsystem Design and Packaging and Component Failure Analysis (IEEE, 2005), pp. 442–446.

F. Wyrowski, E.-B. Kley, S. Buehling, T. J. Nellissen, L. Wang, and M. Dirkzwager, “Proximity printing by wave-optically designed masks,” Proc. SPIE 4436, 130–139 (2001).

[Crossref]

J. J. Toriz-Garcia, J. J. Cowling, G. L. Williams, Q. Bai, N. L. Seed, A. Tennant, R. McWilliam, A. Purvis, F. B. Soulard, and P. A. Ivey, “Fabrication of a 3D electrically small antenna using holographic photolithography,” J. Micromech. Microeng. 23, 055010 (2013).

[Crossref]

J. J. Cowling, G. L. Williams, A. Purvis, R. McWilliam, J. J. Toriz-Garcia, N. L. Seed, F. B. Soulard, and P. A. Ivey, “Three-dimensional holographic lithography by an iterative algorithm,” Opt. Lett. 36, 2495–2497 (2011).

[Crossref]

A. Maiden, R. McWilliam, A. Purvis, S. Johnson, G. L. Williams, N. L. Seed, and P. A. Ivey, “Nonplanar photolithography with computer-generated holograms,” Opt. Lett. 30, 1300–1302 (2005).

[Crossref]

R. McWilliam, A. Purvis, G. Williams, F. Soulard, and N. L. Seed, “High contrast patterns generated by phase-seeded CGH extensible to 3-D patterns and binary modulation,” in Digital Holography & 3-D Imaging Meeting, OSA Technical Digest (Optical Society of America, 2015), paper DTh4A.4.

G. L. Williams, R. McWilliam, A. Maiden, A. Purvis, P. A. Ivey, and N. L. Seed, “Photolithography on grossly non-planar substrates,” in Conference on High Density Microsystem Design and Packaging and Component Failure Analysis (IEEE, 2005), pp. 442–446.

R. W. Gerchberg and W. O. Saxton, “Phase determination for image and diffraction plane pictures in the electron microscope,” Optik 34, 275–284 (1971).

J. J. Toriz-Garcia, J. J. Cowling, G. L. Williams, Q. Bai, N. L. Seed, A. Tennant, R. McWilliam, A. Purvis, F. B. Soulard, and P. A. Ivey, “Fabrication of a 3D electrically small antenna using holographic photolithography,” J. Micromech. Microeng. 23, 055010 (2013).

[Crossref]

J. J. Cowling, G. L. Williams, A. Purvis, R. McWilliam, J. J. Toriz-Garcia, N. L. Seed, F. B. Soulard, and P. A. Ivey, “Three-dimensional holographic lithography by an iterative algorithm,” Opt. Lett. 36, 2495–2497 (2011).

[Crossref]

A. Maiden, R. McWilliam, A. Purvis, S. Johnson, G. L. Williams, N. L. Seed, and P. A. Ivey, “Nonplanar photolithography with computer-generated holograms,” Opt. Lett. 30, 1300–1302 (2005).

[Crossref]

G. L. Williams, R. McWilliam, A. Maiden, A. Purvis, P. A. Ivey, and N. L. Seed, “Photolithography on grossly non-planar substrates,” in Conference on High Density Microsystem Design and Packaging and Component Failure Analysis (IEEE, 2005), pp. 442–446.

R. McWilliam, A. Purvis, G. Williams, F. Soulard, and N. L. Seed, “High contrast patterns generated by phase-seeded CGH extensible to 3-D patterns and binary modulation,” in Digital Holography & 3-D Imaging Meeting, OSA Technical Digest (Optical Society of America, 2015), paper DTh4A.4.

R. McWilliam, A. Purvis, G. Williams, F. Soulard, and N. L. Seed, “High contrast patterns generated by phase-seeded CGH extensible to 3-D patterns and binary modulation,” in Digital Holography & 3-D Imaging Meeting, OSA Technical Digest (Optical Society of America, 2015), paper DTh4A.4.

J. J. Toriz-Garcia, J. J. Cowling, G. L. Williams, Q. Bai, N. L. Seed, A. Tennant, R. McWilliam, A. Purvis, F. B. Soulard, and P. A. Ivey, “Fabrication of a 3D electrically small antenna using holographic photolithography,” J. Micromech. Microeng. 23, 055010 (2013).

[Crossref]

J. J. Cowling, G. L. Williams, A. Purvis, R. McWilliam, J. J. Toriz-Garcia, N. L. Seed, F. B. Soulard, and P. A. Ivey, “Three-dimensional holographic lithography by an iterative algorithm,” Opt. Lett. 36, 2495–2497 (2011).

[Crossref]

J. J. Toriz-Garcia, J. J. Cowling, G. L. Williams, Q. Bai, N. L. Seed, A. Tennant, R. McWilliam, A. Purvis, F. B. Soulard, and P. A. Ivey, “Fabrication of a 3D electrically small antenna using holographic photolithography,” J. Micromech. Microeng. 23, 055010 (2013).

[Crossref]

J. J. Toriz-Garcia, J. J. Cowling, G. L. Williams, Q. Bai, N. L. Seed, A. Tennant, R. McWilliam, A. Purvis, F. B. Soulard, and P. A. Ivey, “Fabrication of a 3D electrically small antenna using holographic photolithography,” J. Micromech. Microeng. 23, 055010 (2013).

[Crossref]

J. J. Cowling, G. L. Williams, A. Purvis, R. McWilliam, J. J. Toriz-Garcia, N. L. Seed, F. B. Soulard, and P. A. Ivey, “Three-dimensional holographic lithography by an iterative algorithm,” Opt. Lett. 36, 2495–2497 (2011).

[Crossref]

F. Wyrowski, E.-B. Kley, S. Buehling, T. J. Nellissen, L. Wang, and M. Dirkzwager, “Proximity printing by wave-optically designed masks,” Proc. SPIE 4436, 130–139 (2001).

[Crossref]

R. McWilliam, A. Purvis, G. Williams, F. Soulard, and N. L. Seed, “High contrast patterns generated by phase-seeded CGH extensible to 3-D patterns and binary modulation,” in Digital Holography & 3-D Imaging Meeting, OSA Technical Digest (Optical Society of America, 2015), paper DTh4A.4.

J. J. Toriz-Garcia, J. J. Cowling, G. L. Williams, Q. Bai, N. L. Seed, A. Tennant, R. McWilliam, A. Purvis, F. B. Soulard, and P. A. Ivey, “Fabrication of a 3D electrically small antenna using holographic photolithography,” J. Micromech. Microeng. 23, 055010 (2013).

[Crossref]

J. J. Cowling, G. L. Williams, A. Purvis, R. McWilliam, J. J. Toriz-Garcia, N. L. Seed, F. B. Soulard, and P. A. Ivey, “Three-dimensional holographic lithography by an iterative algorithm,” Opt. Lett. 36, 2495–2497 (2011).

[Crossref]

A. Maiden, R. McWilliam, A. Purvis, S. Johnson, G. L. Williams, N. L. Seed, and P. A. Ivey, “Nonplanar photolithography with computer-generated holograms,” Opt. Lett. 30, 1300–1302 (2005).

[Crossref]

G. L. Williams, R. McWilliam, A. Maiden, A. Purvis, P. A. Ivey, and N. L. Seed, “Photolithography on grossly non-planar substrates,” in Conference on High Density Microsystem Design and Packaging and Component Failure Analysis (IEEE, 2005), pp. 442–446.

A. K.-K. Wong, Resolution Enhancement Techniques in Optical Lithography (SPIE, 2001).

F. Wyrowski, E.-B. Kley, S. Buehling, T. J. Nellissen, L. Wang, and M. Dirkzwager, “Proximity printing by wave-optically designed masks,” Proc. SPIE 4436, 130–139 (2001).

[Crossref]

J. R. Fienup, “Phase retrieval algorithms: a comparison,” Appl. Opt. 21, 2758–2769 (1982).

[Crossref]

J. Rosen, “Computer-generated holograms of images reconstructed on curved surfaces,” Appl. Opt. 38, 6136–6140 (1999).

[Crossref]

F. Shen and A. Wang, “Fast-Fourier-transform based numerical integration method for the Rayleigh-Sommerfeld diffraction formula,” Appl. Opt. 45, 1102–1110 (2006).

[Crossref]

P. Tsang, T.-C. Poon, W.-K. Cheung, and J.-P. Liu, “Computer generation of binary Fresnel holography,” Appl. Opt. 50, B88–B95 (2011).

[Crossref]

E. Buckley, “Holographic laser projection,” J. Disp. Technol. 7, 135–140 (2011).

[Crossref]

J. J. Toriz-Garcia, J. J. Cowling, G. L. Williams, Q. Bai, N. L. Seed, A. Tennant, R. McWilliam, A. Purvis, F. B. Soulard, and P. A. Ivey, “Fabrication of a 3D electrically small antenna using holographic photolithography,” J. Micromech. Microeng. 23, 055010 (2013).

[Crossref]

J. J. Cowling, G. L. Williams, A. Purvis, R. McWilliam, J. J. Toriz-Garcia, N. L. Seed, F. B. Soulard, and P. A. Ivey, “Three-dimensional holographic lithography by an iterative algorithm,” Opt. Lett. 36, 2495–2497 (2011).

[Crossref]

C. Bay, N. Hubner, J. Freeman, and T. Wilkinson, “Maskless photolithography via holographic optical projection,” Opt. Lett. 35, 2230–2232 (2010).

[Crossref]

A. Maiden, R. McWilliam, A. Purvis, S. Johnson, G. L. Williams, N. L. Seed, and P. A. Ivey, “Nonplanar photolithography with computer-generated holograms,” Opt. Lett. 30, 1300–1302 (2005).

[Crossref]

R. W. Gerchberg and W. O. Saxton, “Phase determination for image and diffraction plane pictures in the electron microscope,” Optik 34, 275–284 (1971).

F. Wyrowski, E.-B. Kley, S. Buehling, T. J. Nellissen, L. Wang, and M. Dirkzwager, “Proximity printing by wave-optically designed masks,” Proc. SPIE 4436, 130–139 (2001).

[Crossref]

G. L. Williams, R. McWilliam, A. Maiden, A. Purvis, P. A. Ivey, and N. L. Seed, “Photolithography on grossly non-planar substrates,” in Conference on High Density Microsystem Design and Packaging and Component Failure Analysis (IEEE, 2005), pp. 442–446.

R. McWilliam, A. Purvis, G. Williams, F. Soulard, and N. L. Seed, “High contrast patterns generated by phase-seeded CGH extensible to 3-D patterns and binary modulation,” in Digital Holography & 3-D Imaging Meeting, OSA Technical Digest (Optical Society of America, 2015), paper DTh4A.4.

J. J. Cowling, “An iterative algorithm for lithography on three-dimensional surfaces,” Ph.D. thesis (Durham University, 2015).

A. K.-K. Wong, Resolution Enhancement Techniques in Optical Lithography (SPIE, 2001).