Abstract

Liquid crystal on silicon (LCoS) devices usually show spatial phase nonuniformity (SPNU) in applications of phase modulation, which comprises the phase retardance nonuniformity (PRNU) as a function of the applied voltage and inherent wavefront distortion (WFD) introduced by the device itself. We propose a multipoint calibration method utilizing a Fizeau interferometer to compensate SPNU of the device. Calibration of PRNU is realized by defining a grid of $3\times 6$ cells onto the aperture and then calculating phase retardance of each cell versus a gradient gray pattern. With designing an adjusted gray pattern calculated by the calibrated multipoint phase retardance function, compensation of inherent WFD is achieved. The peak-to-valley (PV) value of the residual WFD compensated by the multipoint calibration method is significantly reduced from $2.5\lambda$ to $0.140\lambda$, while the PV value of the residual WFD after global calibration is reduced to $0.364\lambda$. Experimental results of the generated finite-energy 2D Airy beams in Fourier space demonstrate the effectiveness of this multipoint calibration method.

© 2016 Optical Society of America

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