Abstract
In this research, the susceptibility of the phase-shifting algorithms to the random intensity error is formulated and estimated. The susceptibility of the random intensity error of conventional windowed phase-shifting algorithms is discussed, and the phase-shifting algorithm is developed to minimize the random intensity error using the characteristic polynomial theory. Finally, the surface shape of the transparent wedge plate is measured using a wavelength-tuning Fizeau interferometer and the algorithm. The experimental results indicate that the surface shape measurement accuracy for the transparent plate is 2.5 nm.
© 2016 Optical Society of America
Full Article | PDF ArticleMore Like This
Yangjin Kim, Kenichi Hibino, Naohiko Sugita, and Mamoru Mitsuishi
Opt. Express 23(25) 32869-32880 (2015)
Yangjin Kim, Younghoon Moon, Kenichi Hibino, Naohiko Sugita, and Mamoru Mitsuishi
Appl. Opt. 59(4) 991-997 (2020)
Yangjin Kim, Kenichi Hibino, and Mamoru Mitsuishi
Opt. Express 26(8) 10870-10878 (2018)