Abstract

This paper presents the design, analysis, and experimental demonstration of electromagnetic actuation utilized on micrograting accelerometers. It mainly consists of a permanent magnet and a driving coil made of three planar printed circuit board coils. A silicon movable platform and the permanent magnet with an axial magnetization of $750\times {10}^3\mathrm{A}/\mathrm{m}$ form the proof mass. The eight cantilever beams and the movable platform are made by means of the etching process, and the aluminum micrograting is fabricated by the lift-off process. Experimental data show that the electromagnetic force can reach 1.41 mN when the driving voltage is about 2.96 V. The linear operating region of the accelerometer is $[-1\mathrm{g},1\mathrm{g}]$ under a driving voltage of $-2.8$ to 2.96 V. A mean sensitivity of $2.82\mathrm{V}/\mathrm{g}$ is obtained by three repeated feedback experiments. In addition, a linear operating region of $[-2.2\mathrm{g},2.2\mathrm{g}]$ is calculated when the driving voltage is $[-7\mathrm{V},7\mathrm{V}]$. There is a linear relation between the driving voltage and the input acceleration.

© 2016 Optical Society of America

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