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Improvement of depth resolution in depth-resolved wavenumber-scanning interferometry using wavenumber-domain least-squares algorithm: comparison and experiment

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Abstract

It is important to improve the depth resolution in depth-resolved wavenumber-scanning interferometry (DRWSI) owing to the limited range of wavenumber scanning. In this work, a new nonlinear iterative least-squares algorithm called the wavenumber-domain least-squares algorithm (WLSA) is proposed for evaluating the phase of DRWSI. The simulated and experimental results of the Fourier transform (FT), complex-number least-squares algorithm (CNLSA), eigenvalue-decomposition and least-squares algorithm (EDLSA), and WLSA were compared and analyzed. According to the results, the WLSA is less dependent on the initial values, and the depth resolution δz is approximately changed from δz to δz/6. Thus, the WLSA exhibits a better performance than the FT, CNLSA, and EDLSA.

© 2016 Optical Society of America

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