Abstract

In the present study, optical constants of e-beam-deposited zirconium dioxide (${\mathrm{ZrO}}_2$) thin film are determined in the 55–150 Å soft x-ray wavelength region using the angle-dependent reflectivity technique. Soft x-ray reflectivity measurements are carried out using the reflectivity beamline at the Indus-1 synchrotron radiation source. Derived optical constants ($\delta$ and $\beta$) are compared with the tabulated values of Henke et al. [http://henke.lbl.gov/optical_constants/asf.html]. It is found that the measured $\delta$ values are consistently lower than the tabulated bulk values in the 70–150 Å wavelength region. In this region, the delta values are lower by 19%–24% from the tabulated data. Below the Zr ${\mathrm{M}}_4$ edge (66.3 Å), a deviation in delta values is found as $\sim 2\%–21\%$. These changes are attributed to growth-related defects (oxygen and voids) and variation in film stoichiometry. To the best of our knowledge, the present study gives the first reported experimental values of optical constants for ${\mathrm{ZrO}}_2$ in the 55–150 Å wavelength region.

© 2016 Optical Society of America

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