Abstract

We report a simple method, based on intensity measurements, for the characterization of the wavefront and aberrations produced by micro-optical focusing elements. This method employs the setup presented earlier in [Opt. Express 22, 13202 (2014) [CrossRef]  ] for measurements of the 3D point spread function, on which a basic phase-retrieval algorithm is applied. This combination allows for retrieval of the wavefront generated by the micro-optical element and, in addition, quantification of the optical aberrations through the wavefront decomposition with Zernike polynomials. The optical setup requires only an in-motion imaging system. The technique, adapted for the optimization of micro-optical component fabrication, is demonstrated by characterizing a planoconvex microlens.

© 2015 Optical Society of America

A simple method for quality evaluation of micro-optical components based on 3D IPSF measurement

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