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Determination of the tangential surface profile of Toroidal beam line mirrors with polarization phase-shifting Twyman–Green interferometer

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Abstract

A new technique for the measurement of the tangential surface profile of Toroidal mirrors (TMs) used in synchrotron radiation beam lines is proposed. A cylindrical lens placed in the collimated input (He–Ne laser) beam of a polarization Twyman–Green interferometer (TGI) forms line foci in the reference and test arms. The effect of the sagittal curvature of the TM is eliminated by adjusting a line focus on the surface of the TM, along the central tangential section. Thus, a toric test wavefront (TTW) with sagittal curvature identical to that of the incident cylindrical wavefront and tangential curvature with slope twice that of the TM, is produced along the reflection direction. The TTW interferes with a reference cylindrical wavefront, generated by retroreflecting the incident cylindrical wavefront from a reference plane mirror in the reference arm of the TGI and having identical curvature in the sagittal direction. Polarization phase-shifting interferometry has been applied to obtain the tangential surface profile of the test TM. Results are compared with other methods. The advantages of the technique are that only a plane reference mirror is needed to generate the reference beam, and the technique is suitable for TMs with long tangential radii of curvature in the kilometer regime.

© 2015 Optical Society of America

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