Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Calibrating system errors of large scale three-dimensional profile measurement instruments by subaperture stitching method

Not Accessible

Your library or personal account may give you access

Abstract

This study presents a subaperture stitching method to calibrate system errors of several 2m large scale 3D profile measurement instruments (PMIs). The calibration process was carried out by measuring a Φ460mm standard flat sample multiple times at different sites of the PMI with a length gauge; then the subaperture data were stitched together using a sequential or simultaneous stitching algorithm that minimizes the inconsistency (i.e., difference) of the discrete data in the overlapped areas. The system error can be used to compensate the measurement results of not only large flats, but also spheres and aspheres. The feasibility of the calibration was validated by measuring a Φ1070mm aspheric mirror, which can raise the measurement accuracy of PMIs and provide more reliable 3D surface profiles for guiding grinding, lapping, and even initial polishing processes.

© 2015 Optical Society of America

Full Article  |  PDF Article
More Like This
Subaperture stitching for measurement of freeform wavefront

Kamal K. Pant, Dali R. Burada, Mohamed Bichra, Mahendra P. Singh, Amitava Ghosh, Gufran S. Khan, Stefan Sinzinger, and Chandra Shakher
Appl. Opt. 54(34) 10022-10028 (2015)

Aspheric subaperture stitching based on system modeling

Lei Zhang, Dong Liu, Tu Shi, Yongying Yang, Shiyao Chong, Baoliang Ge, Yibing Shen, and Jian Bai
Opt. Express 23(15) 19176-19188 (2015)

Subaperture stitching test of large steep convex spheres

Shanyong Chen, Shuai Xue, Yifan Dai, and Shengyi Li
Opt. Express 23(22) 29047-29058 (2015)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (13)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (17)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved