Abstract

We present an optical setup that can be used to characterize the thicknesses of thin NbN films to screen samples for fabrication and to better model the performance of the resulting superconducting nanowire single photon detectors. The infrared transmissometer reported here is easy to use, gives results within minutes, and is nondestructive. Thus, the thickness measurement can be easily integrated into the workflow of deposition and characterization. Comparison to a similar visible-wavelength transmissometer is provided.

© 2015 Optical Society of America

Optical constant of CoFeB thin film measured with the interference enhancement method

Xinan Liang, Xuewu Xu, Ruitao Zheng, Zhiming Abel Lum, and Jinjun Qiu
Appl. Opt. 54(7) 1557-1563 (2015)

Determination of the optical constants and thickness of thin films on slightly absorbing substrates

Rusli and G. A. J. Amaratunga
Appl. Opt. 34(34) 7914-7924 (1995)

Measurement of thickness distribution, optical constants, and roughness parameters of rough nonuniform ZnSe thin films

David Nečas, Ivan Ohlídal, Daniel Franta, Miloslav Ohlídal, Vladimír Čudek, and Jiří Vodák
Appl. Opt. 53(25) 5606-5614 (2014)

Influence of substrate temperatures on the properties of GdF₃ thin films with quarter-wave thickness in the ultraviolet region

Jingcheng Jin, Chunshui Jin, Chun Li, Wenyuan Deng, and Shun Yao
Appl. Opt. 54(16) 5117-5122 (2015)

Simultaneous measurement of the refractive index and thickness of thin films by S-polarized reflectances

Tami Kihara and Kiyoshi Yokomori
Appl. Opt. 31(22) 4482-4487 (1992)