Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

System analysis of full-field reflection-type three-dimensional angle-deviation microscope

Not Accessible

Your library or personal account may give you access

Abstract

This study investigates the system errors found in full-field reflection-type three-dimensional angle-deviation microscopes. The microscope, which is based on the algorithm of reflectivity-height transformation, can be used to measure the 3D surface profile of a specimen in real time without scanning. The system error is made up of the errors caused by the optical components, light source, deflection direction of the test light, lack of focus, object length, magnification, and numerical aperture. The incorrect object location is the principal cause of height measurement error. However, the total error percentage is below 3.2%, and the lateral and axial resolutions are better than 0.5 μm and 1 nm, respectively, in the measuring range of 200 nm.

© 2015 Optical Society of America

Full Article  |  PDF Article
More Like This
Full-field transmission-type angle-deviation optical microscope with reflectivity-height transformation

Ming-Hung Chiu, Chen-Tai Tan, Ming-Hung Tsai, and Ya-Hsin Yang
Biomed. Opt. Express 6(10) 3952-3962 (2015)

Transmission-type angle deviation microscopy

Ming-Hung Chiu, Chih-Wen Lai, Chen-Tai Tan, and Chin-Fa Lai
Appl. Opt. 47(29) 5442-5445 (2008)

Real-time microscopic phase-shifting profilometry

Sam Van der Jeught, Joris A. M. Soons, and Joris J. J. Dirckx
Appl. Opt. 54(15) 4953-4959 (2015)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (15)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (12)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved