Abstract

This study investigates the system errors found in full-field reflection-type three-dimensional angle-deviation microscopes. The microscope, which is based on the algorithm of reflectivity-height transformation, can be used to measure the 3D surface profile of a specimen in real time without scanning. The system error is made up of the errors caused by the optical components, light source, deflection direction of the test light, lack of focus, object length, magnification, and numerical aperture. The incorrect object location is the principal cause of height measurement error. However, the total error percentage is below 3.2%, and the lateral and axial resolutions are better than 0.5 μm and 1 nm, respectively, in the measuring range of 200 nm.

© 2015 Optical Society of America

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