Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Improving holographic reconstruction by automatic Butterworth filtering for microelectromechanical systems characterization

Not Accessible

Your library or personal account may give you access

Abstract

Digital holographic microscopy is an important interferometric tool in optical metrology allowing the investigation of engineered surfaces with microscale lateral resolution and nanoscale axial precision. In particular, microelectromechanical systems (MEMS) surface analysis, conducted by holographic characterization, requires high accuracy for functional testing. The main issues related to MEMS inspection are the superficial roughness and the complex geometry resulting from the several fabrication steps. Here, an automatic procedure, particularly suited in the case of high-roughness surfaces, is presented to selectively filter the spectrum, providing very low-noise reconstructed images. The numerical procedure is based on Butterworth filtering, and the obtained results demonstrate a significant increase in the images’ quality and in the accuracy of the measurements, making our technique highly applicable for quantitative phase imaging in MEMS analysis. Furthermore, our method is fully tunable to the spectrum under investigation and automatic. This makes it highly suitable for real-time applications. Several experimental tests show the suitability of the proposed approach.

© 2015 Optical Society of America

Full Article  |  PDF Article
More Like This
Automatic spatial filtering to obtain the virtual image term in digital holographic microscopy

Jiawen Weng, Jingang Zhong, and Cuiying Hu
Appl. Opt. 49(2) 189-195 (2010)

Adaptive and automatic diffraction order filtering by singular value decomposition in off-axis digital holographic microscopy

Pasquale Memmolo, Vito Renò, Ettore Stella, and Pietro Ferraro
Appl. Opt. 58(34) G155-G161 (2019)

Digital holographic microscope with automatic focus tracking by detecting sample displacement in real time

Pietro Ferraro, Giuseppe Coppola, Sergio De Nicola, Andrea Finizio, and Giovanni Pierattini
Opt. Lett. 28(14) 1257-1259 (2003)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (3)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved