Abstract

Research was undertaken to investigate the electrochromic and optical properties of tungsten oxide (${\mathrm{WO}}_3$) films deposited by introducing hydrogen with a direct current (DC) and pulsed DC sputtering. The results show that ${\mathrm{WO}}_3$ films have optimum electrochromic properties at a hydrogen flow of 4 and 3 sccm for DC and pulsed DC, respectively. In the Raman spectra, the peak intensity increased with the increase of hydrogen flow at both $770{\mathrm{cm}}^1$ and $950{\mathrm{cm}}^{-1}$ peaks, which resulted in bonds of ${\mathrm{W}}^{6+}\text{-}\mathrm{O}$ and ${\mathrm{W}}^{+6}=\mathrm{O}$, respectively. Simultaneously, the transmittance ($\mathrm{\Delta }{T}_{550\mathrm{nm}}$) variations were 65.6% and 64.4%, and the average transmittance ($\mathrm{\Delta }{T}_{400–500\mathrm{nm}}$) variations were 56.7% and 56.4% for DC and pulsed DC, respectively. The bleached/colored ability of the cyclic voltammograms (CVs) was $\mathrm{DC}>\mathrm{pulsed}\mathrm{DC}$, and the resistances of AC impedance were $\mathrm{pulsed}\mathrm{DC}>\mathrm{DC}$.

© 2014 Optical Society of America

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