Abstract

We describe the characterization of a ferroelectric-liquid-crystal-on-silicon (FLCOS) spatial light modulator (SLM) in the production of holograms for use in interferometric metrology. It has already been shown that such a device can be used in producing small-amplitude arbitrary reference surfaces with small but appreciable errors due to the contaminating effect of higher-order structures being propagated through the spatial filter. Here we further quantify the size of these residuals for increasingly large aberrations up to nine waves rms Zernike astigmatism, showing a Zernike-corrected rms wavefront error of roughly 0.06 waves with high vibrational stability. We also present measurements of a vacuum window element using the FLCOS device to drastically reduce interferometric fringe density, showing a residual wavefront error of 0.046 waves rms with dominant components originating from test piece structure rather than holographic errors.

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