Abstract

Based on waveguide coupling technology, we set a kaleidoscope homogenizer to get an intensity redistributed uniform multimode laser beam and then shape the uniform beam into a large area square beam with an imaging system. The simulation results of overall light intensity uniformity are both greater than 89% under the irradiation areas of $3.5\mathrm{cm}\times 3\mathrm{cm}$ and $10\mathrm{cm}\times 10\mathrm{cm}$. In the practical application, it is also greater than 85%. After that, we apply this technology to the photoluminescence imaging detection of semiconductor devices, proving that this technology can be widely used in a variety of research requiring large areas of uniform laser illuminating spots.

© 2014 Optical Society of America

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