Abstract
This paper reviews recent work in the area of silicon photonic devices and circuits for monolithic and heterogeneous integration of circuits and systems on a chip. In this context, it presents fabrication results for producing low-loss silicon waveguides without etching. Resonators and add–drop distributed filters utilizing sidewall modulation fabricated in a single lithography and etching step are demonstrated. It also presents an optical pulse compressor that monolithically integrates self-phase modulation and anomalous dispersion compensation devices on a silicon chip. As an example of heterogeneous integration, we demonstrate vertical emitting metallo-dielectric nanolasers integrated onto a silicon platform. Future research directions toward large-scale photonic circuits and systems on a chip also are discussed.
© 2013 Optical Society of America
Full Article | PDF ArticleMore Like This
Yi Zou, Swapnajit Chakravarty, Chi-Jui Chung, Xiaochuan Xu, and Ray T. Chen
Photon. Res. 6(4) 254-276 (2018)
Jintian Lin, Fang Bo, Ya Cheng, and Jingjun Xu
Photon. Res. 8(12) 1910-1936 (2020)
Riccardo Marchetti, Cosimo Lacava, Lee Carroll, Kamil Gradkowski, and Paolo Minzioni
Photon. Res. 7(2) 201-239 (2019)