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High spatial resolution zonal wavefront reconstruction with improved initial value determination scheme for lateral shearing interferometry

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Abstract

In a recent paper [J. Opt. Soc. Am. A 29, 2038 (2012)], we proposed a generalized high spatial resolution zonal wavefront reconstruction method for lateral shearing interferometry. The test wavefront can be reconstructed with high spatial resolution by using linear interpolation on a subgrid for initial values estimation. In the current paper, we utilize the difference between the Zernike polynomial fitting method and linear interpolation in determining the subgrid initial values. The validity of the proposed method is investigated through comparison with the previous high spatial resolution zonal method. Simulation results show that the proposed method is more accurate and more stable to shear ratios compared with the previous method. A comprehensive comparison of the properties of the proposed method, the previous high spatial resolution zonal method, and the modal method is performed.

© 2013 Optical Society of America

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