Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Linear variable optical filter-based ultraviolet microspectrometer

Not Accessible

Your library or personal account may give you access

Abstract

An IC-compatible linear variable optical filter (LVOF) for application in the UV spectral range between 310 and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a xenon lamp. The image recorded on the camera during calibration is used in a signal processing algorithm to reconstruct the spectrum of the mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on a fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm.

©2012 Optical Society of America

Full Article  |  PDF Article
More Like This
Design and implementation of a sub-nm resolution microspectrometer based on a Linear-Variable Optical Filter

Arvin Emadi, Huaiwen Wu, Ger de Graaf, and Reinoud Wolffenbuttel
Opt. Express 20(1) 489-507 (2012)

Optimal implementation of a microspectrometer based on a single flat diffraction grating

Semen Grabarnik, Arvin Emadi, Elena Sokolova, Gleb Vdovin, and Reinoud F. Wolffenbuttel
Appl. Opt. 47(12) 2082-2090 (2008)

Compact gas cell integrated with a linear variable optical filter

N. Pelin Ayerden, Ger de Graaf, and Reinoud F. Wolffenbuttel
Opt. Express 24(3) 2981-3002 (2016)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (16)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (4)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved