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Control of stress in protected silver mirrors prepared by plasma beam sputtering

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Abstract

Plasma beam sputtering was used to deposit dielectric-protected silver mirrors that exhibited excellent durability and controlled stress. The durability of the mirrors was strongly dependent upon the presence of a very thin chromium adhesion layer between the silver layer and the dielectric overcoat. The stress of the five-layer mirror was balanced by controlling the compressive stress in the top dielectric layer, offsetting the net tensile stress of the combination of layers below.

© 2010 Optical Society of America

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