Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Freeform lens arrays for off-axis illumination in an optical lithography system

Not Accessible

Your library or personal account may give you access

Abstract

We propose a method of designing a freeform lens array for off-axis illumination (OAI) in optical lithography to produce desired OAI patterns and improve efficiency. Based on the Snell law and the conservation law of energy, a set of first-order partial differential equations are derived and the coordinate relations for each OAI pattern are established. The contours of the freeform lens unit are calculated numerically by solving the partial differential equations, and the freeform lens array is obtained by arraying the lens units. Moreover, the optical performance for each OAI pattern is simulated and analyzed by software. Simulation results show that the irradiance distribution of each OAI pattern can be well controlled with a maximum uniformity of 92.45% and a maximum efficiency of 99.35%. Also, analysis indicates that this method has the advantages of reducing the complexity of the exposure system and having good tolerance to the input intensity variations of the laser beam.

© 2011 Optical Society of America

Full Article  |  PDF Article
More Like This
Freeform surface off-axis illumination design with the Monge–Ampère equation method in optical lithography

Yaqin Zhang, Rengmao Wu, and Zhenrong Zheng
Appl. Opt. 53(31) 7296-7303 (2014)

Catadioptric freeform optical system design for LED off-axis road illumination applications

Zhengbo Zhu, Donglin Ma, Qiaomu Hu, Yongqian Tang, and Rongguang Liang
Opt. Express 26(2) A54-A65 (2018)

An approach to increase efficiency of DOE based pupil shaping technique for off-axis illumination in optical lithography

Fang Zhang, Jing Zhu, Weirui Yue, Jian Wang, Qiang Song, Guohai Situ, Frank Wyrowski, and Huijie Huang
Opt. Express 23(4) 4482-4493 (2015)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (4)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (13)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved