Abstract

We report on the development of coatings for a charged-coupled device (CCD) detector optimized for use in a fixed dispersion UV spectrograph. Because of the rapidly changing index of refraction of Si, single layer broadband antireflection (AR) coatings are not suitable to increase quantum efficiency at all wavelengths of interest. Instead, we describe a creative solution that provides excellent performance over UV wavelengths. We describe progress in the development of a coated CCD detector with theoretical quantum efficiencies (QEs) of greater than 60% at wavelengths from 120 to $300\mathrm{nm}$. This high efficiency may be reached by coating a backside-illuminated, thinned, delta-doped CCD with a series of thin film AR coatings. The materials tested include ${\mathrm{MgF}}_2$ (optimized for highest performance from $120–150\mathrm{nm}$), ${\mathrm{SiO}}_2$ ($150–180\mathrm{nm}$), ${\mathrm{Al}}_2{\mathrm{O}}_3$ ($180–240\mathrm{nm}$), MgO ($200–250\mathrm{nm}$), and ${\mathrm{HfO}}_2$ ($240–300\mathrm{nm}$). A variety of de position techniques were tested and a selection of coatings that minimized reflectance on a Si test wafer were applied to functional devices. We also discuss future uses and improvements, including graded and multilayer coatings.

© 2011 Optical Society of America

Delta-doped electron-multiplied CCD with absolute quantum efficiency over 50% in the near to far ultraviolet range for single photon counting applications

Shouleh Nikzad, Michael E. Hoenk, Frank Greer, Blake Jacquot, Steve Monacos, Todd J. Jones, Jordana Blacksberg, Erika Hamden, David Schiminovich, Chris Martin, and Patrick Morrissey
Appl. Opt. 51(3) 365-369 (2012)

Solgel derived tantalum pentoxide films as ultraviolet antireflective coatings for silicon

Timothy J. Rehg, J. Alberto Ochoa-Tapia, André Knoesen, and Brian G. Higgins
Appl. Opt. 28(24) 5215-5221 (1989)

Testing of the durability of single-crystal calcium fluoride with and without antireflection coatings for use with high-power KrF excimer lasers

Doug J. Krajnovich, M. Kulkarni, W. Leung, A. C. Tam, A. Spool, and B. York
Appl. Opt. 31(28) 6062-6075 (1992)

Broadband omnidirectional antireflection coatings for metal-backed solar cells optimized using simulated annealing algorithm incorporated with solar spectrum

Yin-Jung Chang and Yu-Ting Chen
Opt. Express 19(S4) A875-A887 (2011)

Metal–dielectric filters for solar–blind silicon ultraviolet detectors

John Hennessy, April D. Jewell, Michael E. Hoenk, and Shouleh Nikzad
Appl. Opt. 54(11) 3507-3512 (2015)