Polymeric optofluidic Fabry–Perot sensor by direct laser machining and hot embossing

Abstract

We present a polymeric-based Fabry–Perot optofluidic sensor fabricated by combining direct laser machining and hot embossing. This technique provides a more elegant solution to conventional hot embossing by increasing the production rate, improving the reproducibility, and further reducing the cost, providing a large working area and flexibility in design modification and customization. As a proof of concept, a Fabry–Perot (F–P) optofluidic sensor was fabricated in polymethyl methacrylate (PMMA) from a micromachined stamp. The experimental results of the sensor agree well with analytical calculations and show a sensitivity of $2.13\times {10}^{-3}\mathrm{RIU}/\mathrm{nm}$ for fluid refractive index change.

© 2011 Optical Society of America

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