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Precision Mapping of Pairs of Uncoated Optical Flats

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Abstract

The essential features of apparatus suitable for routine mapping of pairs of wedged uncoated optical flats are described. In this method the aperture of the pair of flats is scanned in a regular pattern, and information about the spacing uniformity is derived from the interference of light reflected from the flat surfaces. Accuracies within about λ/500 are obtained.

© 1966 Optical Society of America

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Relative flatness measurement of uncoated optical flats

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