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Parallel phase-shifting interferometry based on Michelson-like architecture

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Abstract

In this paper, we present a new scheme for parallel phase-shifting interferometry that employs a Michelson-like architecture and a simple polarization unit to generate two phase-shifting interferograms with phase shift of π/2 at a single camera exposure. The parallel phase-shifting unit is built with simple optical components, and the distance between the parallel interferograms can be adjusted conveniently. Phase reconstruction is performed by using an algorithm developed for two-step phase-shifting inter ferometry. The practicability of the proposed configuration and the reconstruction method is demonstrated by experiments.

© 2010 Optical Society of America

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