Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Optical accelerometer based on high-order diffraction beam interference

Not Accessible

Your library or personal account may give you access

Abstract

We design and fabricate a novel optical accelerometer based on high-order diffraction beam interference with a built-in phase-generated carrier modulator. A proof-of-concept prototype is tested and achieves a resolution of 96ng/Hz with a dynamic range of 60g. By employing optical interference between ±1 order diffraction beams from a grating translating perpendicular to an optical beam for acceleration sensing, the accelerometer realizes a wide dynamic range, while maintaining a high resolution. Compared with prior optical accelerometers, the interference in this structure is free from the effect of short coherence length or beam divergence, and a greater than ordinary dynamic range is obtained. The proposed design is also applicable to a MOEMS platform, offering a new thought in the design of high-performance MOEMS accelerometers.

© 2010 Optical Society of America

Full Article  |  PDF Article
More Like This
Micro-opto-electro-mechanical systems accelerometer based on the Talbot effect of double-layer diffraction gratings

Liming Jin, Ce Wang, Li Jin, Wenqing Chen, Haodong Xu, Min Cui, and Mengwei Li
Appl. Opt. 61(18) 5386-5391 (2022)

Optical accelerometer based on grating interferometer with phase modulation technique

Shuangshuang Zhao, Juan Zhang, Changlun Hou, Jian Bai, and Guoguang Yang
Appl. Opt. 51(29) 7005-7010 (2012)

High-resolution micro-optical accelerometer with an electromagnetic driver: design and analysis

Shan Gao, Zhen Zhou, Zhuang Huang, and Lishuang Feng
Appl. Opt. 60(26) 7989-7994 (2021)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (9)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved