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Fabrication and characterization of straight and compact S-bend optical waveguides on a silicon-on-insulator platform

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Abstract

Straight and S-bend rib waveguide structures with a novel design have been fabricated and characterized on a silicon-on-insulator (SOI) platform. For a typical straight rib waveguide, the single-mode waveguide at λ1550nm has been verified by measuring the near-field output with an IR camera, and a nearly polarization-independent mode size is found to be 10μm×4.5μm. The waveguide loss has been estimated from low-finesse Fabry–Perot transmission characteristics, and a typical value of 0.5dB/cm is obtained. It is also shown experimentally that the bending radius of an asymmetrically etched S-bend waveguide can be ten times smaller than that of conventional symmetrically etched S-bend waveguides for similar optical losses. These bend waveguides (bending radii of 1500μm) are found to be low loss (<2.5dB) and nearly polarization independent.

© 2009 Optical Society of America

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