Masking mechanisms applied to thin-film coatings for the manufacturing of linear variable filters for two-dimensional array detectors

Mapping of the Uniformity Mismatch Between Calculated and Measured Values Obtained for a ${\mathsf{Ta}}_{\mathsf{2}}{\mathsf{O}}_{\mathsf{5}}$ Single Layer Deposited on a $\mathsf{250}\mathsf{mm}\times \mathsf{180}\mathsf{mm}$ Static Substrate ^a

^a  The figures in the table correspond to the ratio between the measured uniformity and the calculated one after numerical optimization of the deposition parameters used in the “thickness distribution model.” Point coordinates are referenced with respect to the rotation axis of the machine (0, 0).

Transverse Uniformity Calculated for the Internal, Central, and External Lines for a Linear Variable Coating Manufactured Using Both a Translation and a Rotation Movement in the Masking Mechanism

Centering Wavelengths Measured on a Linear Variable Filter Manufactured using Both Translation and Rotation movements in the Masking Mechanism

Transverse Uniformity Measured on a Linear Variable Filter Manufactured Using Both Translation and Rotation Movements in the Masking Mechanism

Table 1

Mapping of the Uniformity Mismatch Between Calculated and Measured Values Obtained for a ${\mathsf{Ta}}_{\mathsf{2}}{\mathsf{O}}_{\mathsf{5}}$ Single Layer Deposited on a $\mathsf{250}\mathsf{mm}\times \mathsf{180}\mathsf{mm}$ Static Substrate ^a

^a  The figures in the table correspond to the ratio between the measured uniformity and the calculated one after numerical optimization of the deposition parameters used in the “thickness distribution model.” Point coordinates are referenced with respect to the rotation axis of the machine (0, 0).

Table 2

Transverse Uniformity Calculated for the Internal, Central, and External Lines for a Linear Variable Coating Manufactured Using Both a Translation and a Rotation Movement in the Masking Mechanism

Table 3

Centering Wavelengths Measured on a Linear Variable Filter Manufactured using Both Translation and Rotation movements in the Masking Mechanism

Table 4

Transverse Uniformity Measured on a Linear Variable Filter Manufactured Using Both Translation and Rotation Movements in the Masking Mechanism