Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Polarization-dependent vacuum-ultraviolet reflectometry using elliptically polarized synchrotron radiation

Not Accessible

Your library or personal account may give you access

Abstract

In the laboratory of the Physikalisch-Technische Bundesanstalt (PTB) at the Berlin electron-storage ring BESSY II, aprocedure has been developed to investigate the dependence of vacuum-ultraviolet reflection on polarization. It is based on characterizing the elliptically polarized synchrotron radiation at PTB's normal-incidence monochromator beamline for reflectometry by means of polarization-sensitive photodetectors. For this purpose, the polarization dependency in the detector responsivity was determined at a small, low, solid angle of acceptance for the synchrotron radiation, i.e., within the orbital plane of the storage ring where the degree of linear polarization is known to be almost 100%. Our method allows the polarization dependence of reflection samples to be measured with relative standard uncertainties ranging from 2.4% to 11% in the spectral range between 60 and 160  nm. The method has been applied to the optimization of polarizing mirrors at the Lyman-α wavelength of 121.6 nm.

© 2007 Optical Society of America

Full Article  |  PDF Article
More Like This
Ultraviolet radiometry with synchrotron radiation and cryogenic radiometry

Ping-Shine Shaw, Keith R. Lykke, Rajeev Gupta, Thomas R. O’Brian, Uwe Arp, Hunter H. White, Thomas B. Lucatorto, Joseph L. Dehmer, and Albert C. Parr
Appl. Opt. 38(1) 18-28 (1999)

Metrology of pulsed radiation for 157-nm lithography

Mathias Richter, Udo Kroth, Alexander Gottwald, Christopher Gerth, Kai Tiedtke, Terubumi Saito, Ivan Tassy, and Klaus Vogler
Appl. Opt. 41(34) 7167-7172 (2002)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (12)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.