Abstract

Radiative properties of thin films are derived based on the concept of optical coherence theory. Instead of the previous approach of deriving the property formulas based on the degree of coherence, a direct integration approach to obtain the averaged properties over a finite spectral resolution is developed. The analytical results are in excellent agreement with the measured spectra. The formulas are compact in form and easy to use to invert optical properties or film thicknesses with measured reflectance or transmittance. Rigorous criteria for incoherent and coherent limits can be easily reduced from the general formulas and the resulting equations corresponding to those of geometric and wave optics, respectively. These criteria are very useful in determining under what situations simpler wave optics and geometric optics formulas can be applied.

© 2006 Optical Society of America

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