Abstract

We present a new fabrication technique based on a two-step UV exposure lithographic process to marginally modulate the refractive index in commercial SU-8 photoresist. This technique achieves refractive index modulation as different regions undergo different thermal densification prior to UV-induced polymerization. A small refractive index contrast of 0.0008 or lower can be achieved, and this is especially useful for fabricating waveguides with a low level of propagation modes. This technique may be extended to other UV-curable epoxy photoresists and can easily be applied in the fabrication of optical elements such as optical interconnects and integrated optical sensors without the development process.

© 2006 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Photothermally enabled lithography for refractive-index modulation in SU-8 photoresist

Biow Hiem Ong, Xiaocong Yuan, Shaohua Tao, and Swee Chuan Tjin
Opt. Lett. 31(10) 1367-1369 (2006)

Thermal UV treatment on SU-8 polymer for integrated optics

Xi-Bin Wang, Jian Sun, Chang-Ming Chen, Xiao-Qiang Sun, Fei Wang, and Da-Ming Zhang
Opt. Mater. Express 4(3) 509-517 (2014)

Low-loss modified SU-8 waveguides by direct laser writing at 405 nm

Jhonattan C. Ramirez, Juliana N. Schianti, Maria G. Almeida, Aristides Pavani, Roberto R. Panepucci, Hugo E. Hernandez-Figueroa, and Lucas H. Gabrielli
Opt. Mater. Express 7(7) 2651-2659 (2017)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription