Abstract
We present a theoretical approach enabling one to perform a preproduction
investigation of the effect of accumulation of thickness errors in the
course of optical coating production using broadband optical monitoring.
On the basis of this approach we investigate and compare thickness errors that may be
associated with such factors as random and systematic errors in measurement
data, instabilities of deposition rates, and inaccuracies of on-line algorithms
predicting termination instants for layer depositions.
© 2006 Optical Society of America
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