Abstract
Reflectance versus incidence angle measurements have been performed from on samples of SiC with a different C∕Si ratio deposited with rf magnetron sputtering. The optical constants of the material at different wavelengths have been determined by using a curve-fitting technique of reflectance values versus incidence angle. Complementary measurements of the incident beam polarization, film thickness, surface roughness, and stoichiometry were performed to complete the analysis of the samples.
© 2006 Optical Society of America
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