Abstract
The analytical solutions of the azimuthal deviation of a polarizer and an analyzer were
obtained by polarizer–sample–analyzer ellipsometry with a three-intensity
measurement technique. By performing two sets of this three-intensity measurement
with the polarizer's azimuth set at 45° and at
, we were able to obtain a
set of ellipsometric parameters free from the azimuthal deviations of the polarizer and the
analyzer.
© 2006 Optical Society of America
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