Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Development of a two-dimensional phase-grating mask for fabrication of an analog-resist profile

Not Accessible

Your library or personal account may give you access

Abstract

Fabrication of a thick analog profile with photoresist is a difficult task in photolithography. We demonstrate that a binary phase-grating photomask with an appropriate period and duty cycles is capable of manipulating the exposure illumination in an analog fashion and can be used for fabrication of the desired analog micro-optics profiles on the surface of a thick photoresist. By choosing the proper period and variation of duty cycle of the phase-grating mask, one can create the desired analog intensity of exposure illumination for an optical stepper. This allows the formation of a wide range of analog micro-optics profiles with an SPR 220-7 photoresist. The numerical convolution of the diffraction efficiency curve and resist exposure characteristics is used to predict the final resist profile and also to design the appropriate duty-cycle distribution for the binary phase grating. As a demonstration of this technology, we fabricated a variety of micro-optical elements, such as a positive lens, ring lens, prism, and vortex of 100200μm diameter, by using a phase-grating mask fabricated in a poly(methyl methacrylate) electron-beam resist.

© 2006 Optical Society of America

Full Article  |  PDF Article
More Like This
Analog micro-optics fabrication by use of a two-dimensional binary phase-grating mask

Jinwon Sung, Heidi Hockel, and Eric G. Johnson
Opt. Lett. 30(2) 150-152 (2005)

Additive lithography for fabrication of diffractive optics

Mahesh Pitchumani, Heidi Hockel, Waleed Mohammed, and Eric G. Johnson
Appl. Opt. 41(29) 6176-6181 (2002)

Micro-optic fabrication with subdomain masking

Mahesh Pitchumani, Jeremiah Brown, Waleed Mohammed, and Eric G. Johnson
Appl. Opt. 43(8) 1676-1682 (2004)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (11)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (12)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved