Abstract

The development of multilayer mirrors for continual use around the K-absorption edge of carbon (4.4 nm) has been begun. Cobalt oxide (Co₃O₄), silicon oxide (SiO₂), and boron nitride (BN) are found to be suitable for multilayer mirrors on the basis of theoretical calculations for wavelengths around the carbon K-absorption edge region. X-ray reflectivity curves with CuKα ₁ x rays of the fabricated Co₃O₄/SiO₂ multilayers have sharp Bragg peaks, and the layer structures evaluated from transmission electron microscopy (TEM) observations are uniform. On the other hand, the Bragg peaks of Co₃O₄/BN multilayers split, and aggregated Co₃O₄ is observed. To improve the Co₃O₄ layer structure, chromium oxide (Cr₂O₃) was mixed into Co₃O₄. The mixed oxide layer structure in the Mix/BN multilayer (Mix = Co₃O₄ + Cr₂O₃) is relatively uniform, and the Bragg peaks do not split.

© 2004 Optical Society of America

Interface quality and thermal stability of laser-deposited metal/MgO multilayers

Christian Fuhse, Hans-Ulrich Krebs, Satish Vitta, and Göran A. Johansson
Appl. Opt. 43(34) 6265-6269 (2004)

Performance of Co/Ti multilayers in a water window soft x-ray regime

Piyali Sarkar, Arup Biswas, Rajnarayan De, K. Divakar Rao, Subir Ghosh, M. H. Modi, Siju John, H. C. Barshilia, Dibyendu Bhattacharyya, and Naba Kishor Sahoo
Appl. Opt. 56(27) 7525-7532 (2017)

Stability and normal incidence reflectivity of W/B₄C multilayer mirror near the boron K absorption edge

P. N. Rao, S. K. Rai, M. Nayak, and G. S. Lodha
Appl. Opt. 52(25) 6126-6130 (2013)

Optical properties of boron carbide near the boron K edge evaluated by soft-x-ray reflectometry from a Ru/B₄C multilayer

Dmitriy Ksenzov, Tobias Panzner, Christoph Schlemper, Christian Morawe, and Ullrich Pietsch
Appl. Opt. 48(35) 6684-6691 (2009)

Structural characterization and lifetime stability of Mo/Y extreme-ultraviolet multilayer mirrors

Benjawan Kjornrattanawanich and Saša Bajt
Appl. Opt. 43(32) 5955-5962 (2004)