Abstract
A surplus amount of oxygen is needed to produce titanium dioxide films by reactive electron-beam evaporation of Ti3O5. We investigated the ratio of the rates at which oxygen molecules and TiOx molecules impinge upon substrates at 25° and 250 °C to produce TiO2 films that show no optical absorption in the visible spectral region. On unheated substrates the ratio was 49, and at 250 °C it was 26, provided that the substrates had been exposed to air after being coated at the given substrate temperature. Higher ratios were required if the TiO2 film was covered with a SiO2 film, which impeded further oxidation. Furthermore, the postdeposition oxidation behavior of these films was studied.
© 2003 Optical Society of America
Full Article | PDF ArticleMore Like This
Friedrich Waibel, Elmar Ritter, and Robert Linsbod
Appl. Opt. 42(22) 4590-4593 (2003)
Hubert Selhofer, Elmar Ritter, and Robert Linsbod
Appl. Opt. 41(4) 756-762 (2002)
Shu-Chung Chiao, Bertrand G. Bovard, and H. A. Macleod
Appl. Opt. 37(22) 5284-5290 (1998)