Transmission laser microscope using the phase-shifting technique and its application to measurement of optical waveguides

Abstract

A type of a transmission phase-shifting laser microscope, believed to be new, has been developed. In this microscope a biprism located between a magnifying lens and an observation plane was used as a beam splitter. The biprism is laterally translated to introduce phase shifts required for quantitative phase measurement with a phase-shifting technique. The disturbance caused by a Fresnel-diffracted wave from the splitting edge of the biprism is reduced by placement of a linear beam stopper at the center of an intermediate image plane. As the first application, the developed microscope is used to measure a refractive-index distribution in optical waveguides. A difference of refractive indices of less than 6 × 10^-5 is clearly measured in the submicrometer region.

© 2002 Optical Society of America

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