Abstract

In the framework of current developments in 157-nm lithography we have investigated the performance of photodetectors with emphasis to their stability and linearity. The measurements were performed in the radiometry laboratories of the Physikalisch-Technische Bundesanstalt at the Berlin electron-storage rings BESSY I and BESSY II with spectrally dispersed synchrotron radiation as well as with highly pulsed F₂ laser radiation at 157 nm in combination with a cryogenic radiometer as the primary detector standard. Relative standard uncertainties of as little as 1% were achieved for the calibration of photodetectors in the spectral range of ultraviolet and vacuum-ultraviolet radiation.

© 2002 Optical Society of America

Absolute measurement of F₂-laser power at 157 nm

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Synchrotron-radiation-operated cryogenic electrical-substitution radiometer as the high-accuracy primary detector standard in the ultraviolet, vacuum-ultraviolet, and soft-x-ray spectral ranges

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