Abstract

We show that all the structural properties of periodic dielectric multilayers can be accurately determined by a combined measurement of the transmission as a function of the wavelength and of the reflection as a function of the angle of incidence when the wavelength of the incident light is fixed. This method is applied to determine the structural properties of two commercial dielectric mirrors, and the results obtained are compared with a measurement of the same structural parameters by use of another technique based on the more standard optical guiding method.

© 2002 Optical Society of America

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