Abstract

In this contribution a new efficient modification of a method that enables us to perform the optical characterization of nonabsorbing and weakly absorbing thin films without using the absolute values of the reflectances measured is presented. Namely, this modification is based on determining the values of the wavelengths corresponding to touching the spectral dependences of the reflectances of the studied films measured for several angles of incidence with the envelopes of maxima and minima of these spectral dependences. By means of combining the explicit formulas containing the wavelengths mentioned and the suitable iteration procedure one can evaluate the values of the thicknesses and spectral dependences of the refractive indices of the films analyzed in reliable and precise ways.

© 2001 Optical Society of America

Simple method for determination of the thickness of a nonabsorbing thin film using spectral reflectance measurement

Jiři Luňáček, Petr Hlubina, and Milena Luňáčková
Appl. Opt. 48(5) 985-989 (2009)

Determination of optical parameters and thickness of weakly absorbing thin films from reflectance and transmittance spectra

Vitaly P. Kutavichus, Valery V. Filippov, and Vitali H. Huzouski
Appl. Opt. 45(19) 4547-4553 (2006)

Complete unambiguous optical characterization of double layers consisting of two strongly absorbing thin films by combined reflection and transmission ellipsometry

Ivan Ohlidal, Edward Schmidt, and Milan Libezny
Appl. Opt. 29(4) 593-598 (1990)

Photometric methods for determining the optical constants and the thicknesses of thin absorbing films: selection of a combination of photometric quantities on the basis of error analysis

Tzwetanka Babeva, Snejana Kitova, and Ivan Konstantinov
Appl. Opt. 40(16) 2675-2681 (2001)

Analytical method of determining optical constants of a weakly absorbing thin film

Yanfei Zheng and Kazuo Kikuchi
Appl. Opt. 36(25) 6325-6328 (1997)