Abstract
Asymmetric transmission gratings operating in the resonance domain
are designed by modeling of the dose-controlled electron-beam
lithography process with Gaussian convolution. We aim to exceed
some efficiency limit ηs over a specified
spectral range and to maximize ηs. The
resultant continuous-profile gratings are fabricated by electron-beam
lithography and proportional reactive-ion etching into
SiO2. We demonstrate gratings with good signal-to-noise
ratio and a diffraction efficiency greater than 40% for wavelengths
from 400 to 750 nm.
© 2000 Optical Society of America
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