Abstract
A chromatic confocal microscope constructed with a white-light
source in combination with a diffractive lens provides
wavelength-to-depth coding for profile measurements of a
three-dimensional sample. We acquired depth-section images
nonmechanically and in parallel by incorporating a slit-scan confocal
technique into the system. A system using a 100× objective
obtained a depth resolution of 0.023 μm comparable with
surface profilometers that operate using conventional confocal
microscopy. Experimental measurements of a four-phase-level
diffractive element and of a machined, metal bearing are
presented.
© 1998 Optical Society of America
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