Ion-exchanged diffractive elements in glass for substrate-mode optics

Grating Period d, Ratio of Aperture Width c to d, Ion-Exchange Time T, Total Diffraction Efficiency η_tot, and Uniformity Error $\mathcal{U}$ of the 1 → 3 Substrate-Mode Beam Splitters Working in Planar and Conical Incidence

Grating Period d, Ratios of Aperture Widths c₁ and c₂ to d, Ion-Exchange Times T₁ and T₂ in the First and the Second Ion Exchanges, Respectively, Total Diffraction Efficiency η_tot, and Uniformity Error $\mathcal{U}$ of the 1 → 5 Substrate-Mode Beam Splitters in Planar and Conical Incidence

Table 1

Grating Period d, Ratio of Aperture Width c to d, Ion-Exchange Time T, Total Diffraction Efficiency η_tot, and Uniformity Error $\mathcal{U}$ of the 1 → 3 Substrate-Mode Beam Splitters Working in Planar and Conical Incidence

Table 2

Grating Period d, Ratios of Aperture Widths c₁ and c₂ to d, Ion-Exchange Times T₁ and T₂ in the First and the Second Ion Exchanges, Respectively, Total Diffraction Efficiency η_tot, and Uniformity Error $\mathcal{U}$ of the 1 → 5 Substrate-Mode Beam Splitters in Planar and Conical Incidence