Calibration method of the specific characteristic of an electronic system of a rotating-analyzer ellipsometer

Abstract

In photometric ellipsometry the optical signal is transformed into an electrical signal by a photodetector, and it passes an electronic system to reduce the noise and to amplify the signal. But inherently it will induce a phase shift and an amplitude attenuation of the output signal. Such a specific characteristic of an electronic system depends on the angular frequency of the signal and gives systematic errors to the results of the measurement of rotating-analyzer ellipsometry. We propose a modified method of measurement that enables us to calibrate the electronic system in the ellipsometric measurement configuration.

© 1997 Optical Society of America

Calibration method for rotating-analyzer ellipsometers

J. M. M. de Nijs, A. H. M. Holtslag, A. Hoeksta, and A. van Silfhout
J. Opt. Soc. Am. A 5(9) 1466-1471 (1988)

Scanning ellipsometer by rotating polarizer and analyzer

L. Y. Chen and David W. Lynch
Appl. Opt. 26(24) 5221-5228 (1987)

Design of a scanning ellipsometer by synchronous rotation of the polarizer and analyzer

Liang-Yao Chen, Xing-Wei Feng, Yi Su, Hong-Zhou Ma, and You-Hua Qian
Appl. Opt. 33(7) 1299-1305 (1994)

Optimizing precision of rotating-analyzer and rotating-compensator ellipsometers

D. E. Aspnes
J. Opt. Soc. Am. A 21(3) 403-410 (2004)

Improved measurement method in rotating-analyzer ellipsometry

Shuichi Kawabata
J. Opt. Soc. Am. A 1(7) 706-710 (1984)