Abstract

An optical setup was built for microscopic damage inspection on transmission-grating facets composed of a gold-wire structure. Contrast improvement was achieved by exploiting the polarizing properties of these gratings in the near-infrared region. Spatial filtering yields an additional contrast enhancement and reduces unwanted signals caused by the periodic support structure. An image-processing algorithm is developed that evaluates the number and the size of the faults in a grating facet with high accuracy from only one digital image.

© 1996 Optical Society of America

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