Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Monolithic formation of thin films on the vertical surface of a substrate by a dual-ion-beam sputtering technique

Not Accessible

Your library or personal account may give you access

Abstract

We have developed a novel method for the selective deposition of thin films on the vertical surface of a planar substrate with a vertical step. This was done with a dual-ion-beam sputtering apparatus that is equipped with two ion-beam sources. Using this technique a multilayer filter was monolithically formed on the vertical surface of a Si substrate on which a photodetector had been fabricated, and clear filtering–photodetecting characteristics were observed. This technique can be applied to the monolithic integration of thin-film devices and waveguide-type optical devices with a vertical end facet.

© 1996 Optical Society of America

Full Article  |  PDF Article
More Like This
Granularity in ion-beam-sputtered TiO2 films

N. Albertinetti and H. T. Minden
Appl. Opt. 35(28) 5620-5625 (1996)

Mechanical and thermoelastic characteristics of optical thin films deposited by dual ion beam sputtering

Eda Çetinörgü, Bill Baloukas, Oleg Zabeida, Jolanta E. Klemberg-Sapieha, and Ludvik Martinu
Appl. Opt. 48(23) 4536-4544 (2009)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved