Abstract

A kinoform is used to split the beam of a Nd:YAG laser into six beams. The laser beams are, by means of optical fibers and collimating–focusing optics, transferred to the surface to be machined. Thus multiple grooves can be machined simultaneously. For demonstration, 100-μm-wide grooves are simultaneously machined into a SnO₂ thin film deposited on a glass substrate. The resulting grooves are well isolated. This result shows that the technique could be used, for example, in solar cell manufacturing to increase the efficiency of laser scribing.

© 1996 Optical Society of America

Nd:YAG laser machining with multilevel resist kinoforms

Mats Ekberg, Michael Larsson, Aldo Bolle, and Sverker Hård
Appl. Opt. 30(25) 3604-3606 (1991)

Laser-machining experiment with an excimer laser and a kinoform

Anna-Karin Holmér and Sverker Hård
Appl. Opt. 34(33) 7718-7723 (1995)

Small-feature-size fan-out kinoform etched in GaAs

Jörgen Bengtsson, Niklas Eriksson, and Anders Larsson
Appl. Opt. 35(5) 801-806 (1996)

Kinoform-only Gaussian-to-rectangle beam shaper for a semiconductor laser

Jörgen Bengtsson
Appl. Opt. 35(20) 3807-3814 (1996)

Single photomask, multilevel kinoforms in quartz and photoresist: manufacture and evaluation

H. Andersson, Mats Ekberg, Sverker Hård, Stellan Jacobsson, Michael Larsson, and T. Nilsson
Appl. Opt. 29(28) 4259-4267 (1990)